Abstract
The static and dynamic pull-in characteristics of electrostatically and piezo-electrically actuated microbeam are investigated. The static pull-in voltage is evaluated using analytical methods based on MCST, CCMT and validated through the use of FE based COMSOL multiphysics tools. The dynamic pull-in voltage obtained from numerical technique and verified with existing literature, lower than the static pull-in voltage. The piezoelectric patch has a significant influence on the pull-in voltage and an effect on the aspect ratio. Moreover, the pull-in band and instability zone of the microbeam with weak and hard forcing function have been investigated using multiple scale method.
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