Abstract
We fabricated a new nonvolatile ferroelectric memory, which consists of vertical metal-ferroelectric- semiconductor diodes. Our diode has a simpler structure than an Ferroelectric Random Access Memory (FRAM) cell, and operates at a lower voltage than Metal Ferroelectric Semiconductor Field Effect Transistors (MFS-FETs) or conventional flash memories. We demonstrated the memory operation using a Pt/PZT/n- SrTiO3 diode in this work. We deposited (001)-oriented PZT on (100) 0.5 wt% Nb doped n-type SrTiO3 substrate using a laser ablation technique. The diodes had a hysteresis loop in their capacitance-voltage characteristics due to ferroelectric polarization in the PZT layer. Their current-voltage curves were Schottky-diode-like and also had a hysteresis loop due to the ferroelectric remanent polarization. We confirmed correct nonvolatile and nondestructive memory readout operation. The write voltages were -5 V to write a logic “0” and above 2.5 V to write a logic “1”. The read voltage was 0.8 V.
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