Abstract
Platinum (Pt) thin-film resistance temperature detector was fabricated on the flexible Hastelloy tapes using magnetron sputtering and MEMS processes. NiCrAlY buffer layer and AlON/Al2O3 insulating layer were deposited on the tapes for stress release and electrical insulation. Post annealing was applied to improve the stability of the sensors. The performance of the sensor was calibrated with temperature up to 550 °C. Compared with the sensor on the alumina ceramic substrate, the sensor on Hastelloy tapes have much smaller thermal hysteresis, higher linearity and excellent stability. Moreover, this flexible sensor can be easily integrated with the metallic components by the welding and the maximum curvature of the sensor is 2 cm−1. This Pt thin-film temperature sensor has great potential in the surface temperature measurement of hot components in harsh environment.
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