Pseudoelasticity of shape-memory titanium–nickel films subjected to dynamic nanoindentation

Abstract

Surface force microscopy was used to examine the dynamic indentation response of austenitic titanium–nickel (TiNi) films sputtered on oxidized silicon substrates. Results demonstrate the significance of indentation cycles, time at maximum contact load, and loading/unloading rate on the nanoscale pseudoelastic behavior of the TiNi films. The dynamic behavior of the films is interpreted in terms of the mechanisms responsible for the energy dissipated in the absence of irreversible deformation. The significant amount of mechanical work dissipated without permanent deformation illustrates the potential of TiNi films as structural materials for dynamic microdevice applications.