Abstract
Electron diffraction phenomena which naturally occur in scanning electron microscopy are applied to the study of the crystal structure of LiTaO3 surface layers following Nb diffusion. Kikuchi maps, which relate to the reciprocal lattice of the crystal, are given for LiTaO3 oriented along the (01.0) and (00.1) crystal axis. Details on sample preparation and microscopy parameters are given along with a brief discussion as to how Kikuchi maps are predicted for this crystal. The techniques used allow observation of only the surface layer; the results are not masked by diffraction effects due to the substrate.
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