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Abstract
A position-sensitive photodiode of new concept is introduced. The device is operated biased above the breakdown voltage in the so-called Geiger mode. The absorption of a single photon results in a mA-range avalanche pulse. The time and position (one coordinate) information of the photon arrival are carried by the avalanche current leading edge. The physics of the device operation is discussed: constraints in the device design are derived. Experimental measurements on silicon test structures with a position-sensitive area of 70 by 14 μm 2 are presented. Spatial resolution better than 10 μm FWHM (full width at half maximum), limited by the spot size of the light beam, and temporal resolution better than 100 ps FWHM are demonstrated.
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