PROTOTYPING OF DIFFRACTIVE GRATING OPTICS FOR SENSOR APPLICATION BY AN INTEGRATED PROBE-BASED SYSTEM

Abstract

Diffractive Optical Elements (DOE) are often associated with the use of laser beam shaping equipment. They can be controlled and verified flexibly according to application. This paper demonstrates experimentally the lithography technique used to fabricate a DOE with precisely aligned pattern on a polymer surface. We have designed and fabricated a grating on the lens surface using the direct lithography by an Atomic Force Microscope. A description of the optical design is presented along with a discussion on the integrated manipulation system. The fabrication process has been proven to be cost efficient and reliable. It is believed that this technique can also transfer onto a complicated DOE.