Abstract

Being small in size and weight, piezoelectric transducers hold unique positions in vibration sensing and control. Here, we explore the possibility of building a compact vibration isolation system using piezoelectric sensors and actuators. The mechanical resonances of a piezoelectric actuator around a few kHz are suppressed by an order of magnitude via electrical damping, which improves the high-frequency response. Working with a strain gauge located on the piezoelectric actuator, an auxiliary control loop eliminates the drift associated with a large servo gain at dc. Following this approach, we design, optimize, and experimentally verify the loop responses using frequency domain analysis. The vibration isolation between 1 Hz and 200 Hz is achieved and the attenuation peaks at 60 near vibration frequency of 20 Hz. Restrictions and potentials for extending the isolation to lower vibration frequencies are discussed.

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