Abstract
We discuss the results of fabrication and experimental study of a high-power excimer XeCl laser for industrial applications. Compactness of the laser is achieved by the employment of a laser chamber based on a ceramic tube made of . High laser output energy is obtained using a wide-aperture (up to ) volume discharge with pre-ionisation by a creeping discharge. The pre-ionisation is realised through a semi-transparent electrode by the UV radiation of a creeping discharge in the form of uniform plasma sheet on a surface of a plane sapphire plate. The operating lifetime of the gas mixture amounts to at a stabilised average laser power of . The results obtained demonstrate real prospects for developing a new class of excimer XeCl lasers with an average power of .
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
