Abstract
Mesoporous silica/phosphate composite films were synthesized from a vapor phase onto a Si substrate. Field emission scanning emission microscope and X-ray diffraction measurements show that the resultant films have ordered pore channels with a hexagonal arrangement parallel to the film surface. The proton conductivity for the mesoporous silica/phosphate composite films was 0.07-0.38 S cm -1 . The proton conductivity was not affected much by water vapor pressure. The activation energy for the proton conduction was low (13 kJ mol -1 ). The high P-OH group content and the ordered periodic mesostructure contributed to the high proton conductivity.
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