Abstract
In this work, the 400-keV proton implantation with a fluence of 8 × 1016 ions/cm2 was employed to form a planar waveguide in the Nd: CLNGG crystal. The distributions of the energy loss and the refractive index profile were simulated by the SRIM 2013 and the RCM, respectively. The m-line curve and the near-filed intensity distribution were measured by the prism coupling technique and the end face coupling method, respectively. The proton-implanted Nd: CLNGG crystal waveguide with well-confined propagation can serve as an active integrated element.
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