Proton Conduction Of SrZr0.95Y0.05O3-δ Thin Film Prepared By RF Magnetron Sputtering

Abstract

Proton conductor SrZr0.95Y0.05O3-δ thin films have been deposited on SrTiO3(100) substrates by RF magnetron sputtering. The as-deposited thin films exhibit highly a-axis orientation on the substrate. The lattice constant of a-axis decreases with increasing film thickness. The thin film consists of small grain and smooth surface. The proton conduction is observed in the low temperature region between 200 and 400 °C. Although the conductivity does not depend on the film thickness, the proton conductivity of the thin film is higher than that of bulk crystal. The above results may indicate that the proton conductivity is closely related with the lattice distortion and oxygen vacancies.