Abstract
Optical micro cavities exhibit high quality factors due to the circulation of resonant optical fields within the cavity. Polymers are good materials for the fabrication of micro cavities for practical applications due to the availability of various refractive indices and their low cost. Polymer micro cavities generally yield low Q-factors compared to semiconductor materials because of inherent material absorption losses, and their Q-factors are limited by the low index contrast between the polymer and the substrate material. In the present work, three dimensional micro cavities were fabricated in SU-8 using proton beam writing to enhance the index contrast by isolating the cavities from the substrate.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
