Proton beam lithography at the University of Surrey’s Ion Beam Centre

Abstract

Investigations into the lithography applications using MeV protons and α-particles are being performed at the Ion Beam Centre of the University of Surrey, UK. This is a new application of the microbeam in this laboratory. Proton beam lithography has been carried out on several materials: The first microstructures were made on bulk polymers, to test the performance of our beam. Photosensitive glasses have also been micropatterned with successful results and more recently, proton lithography of semiconductor materials has been introduced. In this paper we present a few structures made in GaAs and PMMA.