Abstract
In order to increase the service life of critical products made of refractory metals, the most effective is the use of protective coatings based on oxidation-resistant ceramic materials. Using an electrode/target made of heterophase HfSi2-MoSi2-HfB2 ceramics by electrospark deposition (ESD), high-power impulse magnetron sputtering (HIPIMS) technologies, as well as the combined ESD+HIPIMS technology, coatings were deposited onto molybdenum substrate (MCh-1 brand). Electrode materials and coatings were studied by the X-ray diffraction, the glow discharge optical emission spectroscopy, the X-ray spectral microanalysis, and the scanning electron microscopy. Combined ESD+HIPIMS technology made it possible to create a hard layer of oxidation-resistant ceramics on the surface of the substrate, which does not produce through cracks inherent in ESD coatings.
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