Abstract
Deposition of diamond like carbon (DLC) films on YBCO superconducting detectors is reported. The method is to make a DLC film by C + implantation and XeCl excimer laser irradiation. The implantation energy is 20–35 keV and C + implantation dosages D=1×10 14–5×10 18 ions/cm 2. The parameters of XeCl excimer laser ablation are: wavelength, 308 nm; energy density, 20–50 mJ/cm 2; and width of pulse, 45 ns. The superconductivity of C +-implanted YBCO is also investigated, while the damage behavior of C + implantation and the mechanism of coating DLC are analyzed.
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