Abstract
AbstractMicrofocal x‐ray projection microscopy allows the non‐destructive investigation of thick specimens with a lateral resolution in the micrometre range. The minimum detectable thickness lies below 100 nm for strongly absorbing materials. For further investigation, x‐ray microtomography leads to three‐dimensional reconstruction of the specimen. Some applications of x‐ray microscopy are connected with the localization and imaging of solid/solid interfaces deeply buried in a matrix. In the future, solid/liquid interfaces and their motion will be of interest. The performance of x‐ray microscopy is discussed and x‐ray projection images obtained with a simple modified scanning electron microscope are shown.
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