Abstract
A method for detecting dielectric breakdown in the signal of cathodoluminescence in SEM is compared with both capacitive and secondary-emission methods. In the investigated samples of glass dielectrics, breakdowns of two types are found: surface and emission. The prospects for using cathodoluminescence to detect and localize defects in insulators that lower the breakdown voltage are discussed.
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More From: Bulletin of the Russian Academy of Sciences: Physics
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