Abstract
This review is devoted to the consideration of prospects and directions for the development of methods and approaches to the analysis of high-purity industrial gases and volatile hydrides, chlorides, fluorides, and organoelement compounds with natural and isotopically enriched compositions. The currently known capabilities for the determination of impurities in them using mass spectrometry, IR spectroscopy, gas chromatography, and chromatography–mass spectrometry are analyzed.
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