Abstract

Pulsed electroacoustic (PEA) method has been widely used to observe space charge in dielectrics. The ordinary PEA unit sandwiches a specimen for applying the pulsed electric field. There have been long awaited demands to monitor space charge profiles under electron beam or radioactive rays irradiations, as well as to observe space charge behaviour during plasma processing. This paper proposes a new PEA system without a top electrode unit. The new system can measure internal space charge profiles without covering irradiation surface of specimens.

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