Abstract
An r.f. reactive sputter deposition technique was adopted to deposit ferroelectric lead zirconate titanate (PZT) thin films with high rate from a ZrTi alloy target combined with PbO pellets. The deposition characteristics, including the effects of the PbO area ratio, were discussed. A new deposition mode called the `quasi-metallic mode' was observed. Perovskite PZT films were prepared at a growth temperature as low as 450°C. However, because the target structure is unstable, we proposed a mixture target which consisted of Zr, Ti and PbO. Fundamental experiments were researched using the powder target. The perovskite PZT film could also be obtained at 450°C with better electrical properties.
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