Abstract
There is strong demand for the development of micro-manufacturing techniques to realize three-dimensional micro-structures. One of the important techniques is micro-stereolithography, which solidifies photopolymer resin using optical energy. Regarding the manufacturing accuracy of micro-stereolithography, structural errors should be improved; however, they are influenced by optical conditions, the material conditions of resins, and so on. Because dimensions and shapes can be evaluated only after completing all of the manufacturing processes, in-process measurement is useful for improving manufacturing accuracy. The solidified photopolymer resin changes its refractive index as little as 0.04, compared with the case before solidification. In this study, the surface plasmon resonance (SPR) is proposed to measure minute changes of the refractive index. The condition required to excite SPR is highly sensitive to both the refractive index of environmental materials and the thickness of (and materials used in) the plasmonic substrate. In this paper, the novel method and fundamental properties are discussed.
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