Abstract
The aim of the present study is to treat circular- and spiral-shaped viscous micropumps unitarily and provide guidelines for determining the appropriate micropump for performance requirements. Three-dimensional theoretical equations applicable to circular- and spiral-shaped micropumps were derived. Numerical simulations were also performed, and the results were compared with the theoretical results. The results were qualitatively consistent. By comparing the performances of the two micropumps, the spiral- and the circular-shaped micropumps are suitable in the ratio of outermost diameter to channel width c<SUP>*</SUP> < 0.2, and c<SUP>*</SUP> > 0.2, respectively. The theoretical performance for rotating disk-type micropumps was expressed in a unified manner. Furthermore, the design guideline was provided based on the theoretical method.
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