Abstract

A new method for absolute length measurement with a resolution of sub-nanometer and a measuring range of a few millimeters by combining a “crystalline lattice scale” and laser interferometry is proposed. The crystalline lattice scale is realized using a regular crystalline surface as a reference and a scanning tunneling microscope (STM) as a detector. The crystalline lattice scale and laser interferometer are utilized as fine and coarse reference scales, where the lattice spacing and optical wavelength are basic references.KeywordsAbsolute length measurementcrystalline lattice scalesub-nanometerscanning tunneling microscopeatomic force microscopelaser interferometerphase modulation

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