Property of nitrogenated tetrahedral carbon on magnetic head prepared by filtered cathodic arc deposition

Abstract

AbstractNitrogenated tetrahedral carbon films were prepared by filtered cathodic arc deposition. Raman spectroscopy analysis shows N incorporation increases the clustering of the sp2 phase, Nanoindentaion shows the hardness reduction caused by N incorporation can be compensated by optimization of C ion energy in the deposition. Ta‐C:N films shows higher extinction coefficient and less transparency. The good morphology of films implies ta‐C:N overcoat has good coverage on magnetic head. Corrosion experiment reveals ta‐C:N overcoat has better anti‐corrosion performance. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)