Abstract
In this paper, a high crystalline film has been deposited on the quartz glass substrate using the radio-frequency magnetron sputtering method. The crystallinity and surface morphology of the film were characterized by IR spectroscopy, X-ray diffraction (XRD), scanning electron microscopy, and atomic force microscopy (AFM). The XRD result indicated that the obtained film was (0 3 1) fiber textured, and the AFM result showed that the film surface was smooth and compact. The important point was that the prepared film displayed strong adhesion and high sensitivity to various mechanical stresses. A green triboluminescence circle and a bright green impact mechanoluminescence can be observed when the mechanical stimuli were applied on the film.
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