Abstract
High temperature superconductor YBa 2Cu 3O x (YBCO) and Bi 2Sr 2CaCu 2O x (BSCCO) thin film microstrips were prepared by argon ion beam etching down to a geometrical width W g≈250 nm. A study of transport properties of the superconducting microstrips showed that due to the interaction of accelerated argon ions with the superconductor film the edges of microstrips are damaged to a depth Δ W≈85 nm. The effective width of YBCO microstrip W ef = W g−2Δ W≈80 nm is able to transmit a critical current density above 20 MA/cm 2 at a temperature of 30 K and a zero external magnetic field. The critical current density of similar BSCCO microstrips was several times smaller.
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