Abstract
Single-mode TE10 rectangular waveguides operating near 3 THz have been demonstrated. The waveguides have internal dimensions of 75 μm × 37 μm (WR-0.3) and are fabricated using an additive gold electroplating process on a silicon substrate. The impact of photoresist removal holes was minimized by full-wave design of the hole and matching structures. Waveguides were measured at three frequencies from 2.56 to 3.11 THz and demonstrated loss as low as 1.3 dB/mm at 3.11 THz, corresponding to a loss per wavelength of 0.12 dB/λ. This paper summarizes the design, fabrication, and measurement of these micromachined waveguides operating near 3 THz.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: IEEE journal of selected topics in quantum electronics : a publication of the IEEE Lasers and Electro-optics Society
Paper Title
Journal
Date
