PROPERTIES OF RF SPUTTERED Co/Pt and Co/Pd MULTILAYERS

Abstract

Series of Co/Pt and Co/pd multilayers have been prepared by RF sputtering (Leybold Z-400) using Ar and Kr as sputtering gas. In this case we used one target position on which two small targets were fixed. The background pressure was typically 1*10-7 mbar. The substrates were positioned below the targets on a rotating table. The thickness was determined by measuring exposure time combined with Dektak and low angle x-ray measurements. The number of bi-layers is 25. The hysteresis loops were measured by VSM and MOKE tracer.The effective anisotropy has been measured by Torque measurements and further characterisation has been made by low and high angle x-ray diffraction. All films have been prepared on Si (100) substrates and a comparison is made between MLs with and without a 20 nm seedlayer.Some basic properties of the Co/Pt and Co/Pd multilayers are given in table 1.