Abstract
The structural, optical and electrical properties of polycrystalline ZnO thin films deposited by metal organic chemical vapor deposition are studied. The surface roughness of the as-deposited ZnO thin films reduces with the increase of growth temperature from 200 to 400 °C, and increases with further increase of the growth temperature from 400 and 500 °C. All the films possess a transmittance near 100% in the visible region except the samples grown at temperatures of 450 and 500 °C. The resistivity of ZnO thin films decreases with the increase of growth temperature. The optical band gap energy of the as-grown ZnO blue-shifted from 3.295 to 3.447 eV as the growth temperature decreased from 500 to 200 °C, which is due to the increase of localized states in the conduction band, associated with the amorphitization of the film.
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