Properties of PLT thin film pyroelectric detectors III. Influences of buffer layer

Abstract

In order to reduce the influence of silicon substrate on the response and noise properties, a buffer layer of low thermal conductivity is applied between pyroelectric thin film and the substrate. The influence of the buffer layer on the performances of the detector is theoretically analyzed. Porous silica thin film is prepared as the buffer layer. Experimental results show that the buffer layer obviously increases the pyroelectric response within a low frequency range.