Abstract
A novel sputtering source (named the SPT target) has been investigated for continuous preparation of a Co-Cr composite perpendicular recording medium. A very low discharge voltage was established at a low working pressure. A high recovery of the emitted material and low-temperature high-rate sputtering has been achieved at the same time. The prepared Permalloy film exhibited soft enough magnetic properties and a high crystal orientation for a back layer of the medium. Some optimum conditions for the continuous preparation of a Co-Cr layer, realizing a higher crystallinity, are also discussed. >
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