Properties of PE-CVD DLC films as field electron emitters prepared in different regimes

Abstract

The use of silicon tip emitters coated with diamond-like carbon (DLC) films allows one to combine the advantages of Si emitters and the unique properties of DLC films. The low electron affinity, chemical and mechanical endurance, and high thermal conductivity of DLC films improve the emission parameters of Si emitters. The DLC films can be formed at low temperature, are flat and their properties can be controlled with growth conditions. Previous results on DLC coatings, demonstrated very substantial enhancement of the field emission, but their hardness and stability still have to be improved. In this work the influence of the diamond-like carbon (DLC) films deposited in different conditions on electron field emission of silicon tips have been investigated.