Abstract
The use of metallorganic precursors for deposition of wear and corrosion resistance coatings has been studied. The coatings were deposited onto steel substrates by MOCVD by the thermal decomposition of bis-aren chromium compounds (BACC) and d.c. plasma-enhanced decomposition of carbonyls of tungsten and/or molybdenum. BACC decompose at 430–470°C in a pressure range of 0.1–3 Torr. The result is Cr-C non-porous shiny coatings with an average rate of deposition of 0.5–1.5 microns min -1. X-ray analysis of the coatings does not reveal a crystalline structure, which suggests that this coating is amorphous. Metallographic examination revealed that after etching the coatings exhibit a “white-black layers” structure. The coating demonstrates high hardness (1800–2000 HVN), good adhesion, and corrosion and wear resistance. PECVD of Mo/W-C coatings was carried out at 320–400°C and pressure 0.01–1 Torr. The substrate was heated up by glow discharge. The coatings produced retain very high hardness and average corrosion resistance.
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