Abstract
The effect of an ion beam injected along the axis of the anode electrode of a planar magnetron on the ignition of an anomalous low-pressure glow discharge in the magnetron is considered. The characteristics of the discharge ignition at pressures <8·10–2 Pa and the properties of a planar magnetron upon irradiation of the magnetron cathode by an argon ion beam are determined. It has been established that the discharge ignition voltage decreases with increasing ion energy. Its dependence on the ion beam current has a threshold character. The prospects of expanding the functionality of planar magnetrons by matching the sputtering modes of the central anode by an ion beam and the magnetron cathode by plasma ions of an anomalous glow discharge is shown.
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