Properties of Love waves in a piezoelectric layered structure with a viscoelastic guiding layer

Abstract

A theoretical method is developed for analyzing Love waves in a structure with a viscoelastic guiding layer bounded on a piezoelectric substrate. The dispersion equation previously derived for piezoelectric Love waves propagating in the layered structure with an elastic layer is adopted for analyzing a structure with a viscoelastic layer. A Maxwell–Weichert model is introduced to describe the shear stiffness of a polymeric material. Newton’s method is employed for the numerical calculation. The dispersion equation for piezoelectric–elastic Love waves is proved suitable for solving a structure with a viscoelastic layer on a piezoelectric substrate. The theoretical results indicate that the propagation velocity of the Love wave is mainly decided by the shear stiffness of the guiding layer, whereas the propagation loss is approximately proportional to its viscosity. A detailed experimental study was conducted on a Love wave delay line fabricated on an ST-90° X quartz substrate and overlaid with various thicknesses of SU-8 guiding layers. A tail-raising caused by the viscosity of the guiding layer existed in both the calculated and the measured propagation velocities. The calculated insertion loss of the Love wave delay lines was in good agreement with the measured results. The method and the results presented in this paper are beneficial to the design of Love wave sensors with a viscoelastic guiding layer.