Abstract

Love wave sensors are highly sensitive microacoustic devices which are especially suited for sensing in liquids. In this paper we review the basic properties of Love waves and their utilization in sensor devices for (bio)chemical as well as for density and viscosity measurements. These properties are first discussed in general and then illustrated by means of numerical sample results for an -quartz layered structure. Furthermore the technology needed to produce such a Love wave device is discussed. Finally we present an overview on the current state of the art in Love wave sensor research.

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