Abstract
Lithium tantalite (LiTaO3) thin films have been successfully deposited on Pt(111)/SiO2/Si(100) substrates by means of sol–gel spin-coating technology. The XRD results show that the LiTaO3 thin films heated at temperatures higher than 700°C exhibit randomly oriented polycrystalline. The relative dielectric constant (εr) increases from 35 to 300 at temperature ranging from 30 to 610°C, then decreases as the temperature increases above 610°C. The dielectric loss factor (tan δ) is as low as 0.006 at temperatures ranging from 30 to 770°C. For the first time, the ferroelectric properties of LiTaO3 thin films (∼0.5 µm) deposited on Pt(111)/SiO2/Si(100) substrates have been investigated. The sample shows a phase transition at 610°C, a coercive field (Ec) of 22.3 kV/cm, a remnant polarization (Pr) of 2.4 µC/cm2 and a maximum pyroelectric coefficient (γ) of 4.0×10-8 C/cm2·K at 62°C. The high figures of merit (FV and Fm of 2.1×10-10 C·cm/J and 2.4 ×10-8 C·cm/J, respectively) of LiTaO3 films reveal that a good infrared response of this LiTaO3 thin film can be utilized in its application to detectors.
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