Abstract
Ion beam mixing method, which has an advantage in forming a metastable alloy phase, was applied to Co/Pt multilayered films to produce an enhanced magneto-optical(MO) property, and the influence of external magnetic field during ion beam mixing on the property was investigated. Co/Pt multilayered films of [Pt(131A)/Co(45A)]× 4 and [Pt(88A)/Co(88A)]×4 were prepared onto SiO2 substrates by alternating electron-beam evaporation. Ion beam mixing by 80 keV Ar+ was carried out at varous temperatures with and without external magnetic field. Polar MO Kerr effects were investigated by using Kerr spectroscopy at room temperature. The phase formation and intermixing of ion beam mixed Co/Pt multilayered films were determined using x-ray diffraction and Rutherford backscattering spectroscopy, respectively and showed a correlation with polar MO results.
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