Abstract
We have developed cylindrical RF plasma sources sustained with multiple low-inductance antenna (LIA) units and have measured plasma parameters for argon plasmas. The plasma source could be operated at 2 000 W RF powers to attain plasma densities as high as 1012 cm−3. The plasma potential as low as 13–14 V in high-density plasmas has been achieved and the potential drop from plasma potential to floating potential was almost constant at 10 V. Kinetic energy distributions of Ar ions were measured at argon pressures around 1.3 Pa in an RF power range of 200–2 000 W, which have peaks which almost correspond to the magnitude of the plasma potential.
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