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Abstract
AbstractWe fabricated highly sensitive room temperature hydrogen sensors based on SnO2 films. The films were deposited by the photochemical deposition. A solution containing SnSO4 with its pH adjusted to about 1.4 by HNO3 were dropped onto the glass substrate and irradiated with the UV light. After 5min irradiation, the substrate was washed with water and dried before dropping the new solution. The films were fabricated by repeating this process. The sample annealed at 200 °C showed current increase by a factor >104 within 1 min for 5000 ppm hydrogen at room temperature. The removal of hydrogen from the ambient caused only a small decrease in the current, but the current decreased by more than three order of magnitude almost instantly upon subsequent exposure to air. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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