Abstract

A multilayered film of ZnO:Al and ZnO was prepared by alternating sputtering in Ar gas, and the influence on electrical properties of ZnO layers, inserted between ZnO:Al layers, was examined. Both the carrier concentration and the Hall mobility were increased. The data show that some carrier electrons now move in the undoped ZnO layer and that the film crystallinity was improved in the multilayered film deposition.

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