Abstract
The properties of an ECR plasma in various gas species have been clarified through soft X-ray and probe measurements. Soft X-ray measurements were performed on hot electron plasmas in the energy range of 1–15 keV and hot electron parameters were determined. Using data concerning cold plasma parameters determined from probe measurements, a close correlation was found in the production and/or heating of cold and hot electron components by changing the external parameters over a wide range.
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