Abstract
Recently, metallo-organic compounds have become the donors of titanium in the PACVD process because a chlorine atmosphere is to be avoided. A Ti(NCO) layer was formed on tool steel by using titanium tetraisopropoxide, hydrogen and nitrogen under glow discharge conditions. This process was combined with the plasma nitriding process to obtain composite Ti(NCO) layers on tool steel. The layers thus obtained had high hardness, good wear and corrosion-resistant properties. Detailed results on the structure and properties of this layer are presented.
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