Abstract
Coating have been produced by bias activated reactive evaporation method (BARE) [1] on polished HSS steel and Corning glass substrates. Titanium and molybdenum were co-evaporated using a special two-hearth electron gun with separate Ti and Mo evaporation sources. Various chemical compositions were obtained by means of heating time control of respective materials. The working gases were nitrogen, acetylene and a 1:1 mixture of both. The investigation of properties of layers with various chemical compositions covered samples: TiC, TiCN, TiN, (Ti,Mo)C, (Ti,Mo)CN, (Ti,Mo)N, MoC, MoCN, MoN. The chemical film compositions were determined using the energy-dispersive X-ray analysis (EDAX) method. Vickers hardness measurements were made. The structures of the deposited layers were examined by means of X-ray diffraction. The electrical measurements of the deposited layers covered resistivity (ρ) and temperature coefficient of resistivity (TCR). It has been found that the measurements of electrical properties may be very sensitive indicators of the layer composition and structure.
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