Abstract
Abstract The composition, electrical conductivity and optical transmission of sputtered thin films of Cd2SnO4 were studied in relation to r.f. sputtering power and deposition rate and also in relation to the effects of post-deposition heat treatment. Sputtering conditions can be varied to give a stoichiometric cadmium:tin ratio in the film at which the conductivity is shown to have a maximum value. Design data are given relating the transmission of coated soda glass to film resistance in ohms per square.
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