Abstract
We prepared Al-doped ZnO (AZO) thin films on polycarbonate (PC) substrates at room temperature by using a facing target sputtering (FTS) method. The PC substrate has advantages of light weight and easy deformation. Therefore, a study of deposition on a flexible substrate is necessary. In this study, we used a PC substrate with a thickness of 200 µm, and the transmittance was above 90 % in the visible range. The AZO thin films were prepared at various sputtering powers and various PO2 (O2 gas /Ar gas +O2 gas). The properties of the AZO thin films were measured by using X-ray diractometer, an UV/VIS spectrometer, a Hall measurement system, and a field-emission scanning electron microscope (SEM). From the results, the lowest resistivity of the AZO thin films was 8.79 ◊ 10 4 [-cm], and the transmittance of several AZO thin films was over 90 % in visible range.
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