Abstract
Highly transparent and conductive thin films of tin-doped indium oxide (ITO) on glass substrates were grown by the ion beam-assisted deposition (IBAD) technique without any substrate heating. X-Ray diffraction investigations indicated that all films have an amorphous structure and no other crystalline phases. The addition of Ar to O 2 flow and the increased energy of incident ions were found to reduce the resistivity of the grown films. Observed decrease in the resistivity was attributed to the increase in the carrier concentration. In the optimal growth conditions at room temperature, we obtained the electrical resistivity of 4.6×10 −4 Ω-cm, visible transmittance (at λ=550 nm) ≥90%, and optical direct band gap energy of ≅3.75 eV.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
