Properties of amorphous silicon carbide film deposited by PECVD on glass

Abstract

Amorphous hydrogenated silicon carbide film was deposited by plasma enhanced chemical vapor deposition (PECVD) on glass. Growth behavior, mechanical properties including surface hardness, film adhesion and wear resistance and optical properties including ultraviolet and visible light transmittance and refractive index were investigated to reveal the possibility of application on protective coating. Experimental results showed that two components in the film including nodules and flat film created by radical-molecule reaction and ion-molecule reaction, respectively, determined the mechanical properties and optical properties of the coatings. A flat film with a denser structure showed a higher hardness, stronger adhesion and higher refractive index. The hydrogenated silicon carbide films with a light yellow appearance, transparency in visible light and greater wear resistance than the glass indicate their possible application as a protective coating on the glass.