Abstract
Amorphous Li–La–Ti–Zr–O thin film electrolyte has been deposited on the tin-doped indium oxide (ITO)/glass substrate by radio frequency magnetron co-sputtering using Li0.33La0.56TiO3 (LLTO) and Li7La3Zr2O12 (LLZO) powder targets. The ionic conductivity and electronic conductivity of the Li–La–Ti–Zr–O thin film electrolyte are investigated at room temperature by AC impedance and I–V curve, respectively. The results show that the as-prepared amorphous Li–La–Ti–Zr–O thin film electrolyte has a high ionic conductivity of 2.83×10−6Scm−1 and a low electronic conductivity of 5.10×10−10Scm−1, and can be used as an electrolyte of all-solid-state thin film lithium batteries.
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